Applied Surface Science, Vol.253, No.2, 926-929, 2006
Effect of atmospheric pressure dielectric barrier discharge air plasma on electrode surface
In order to study the influence of plasma on electrode, atmospheric pressure dielectric barrier discharge (DBD) air plasma is employed here to treat copper electrode surface. Plasma is generated between the parallel plate electrodes by means of high voltage produced by a high-frequency power supply with transformer. Electrode surface alterations induced by air plasma are investigated by using field emission scanning electron microscope (FE-SEM), X-ray energy dispersion spectroscopy (EDS) and contact angle measurement. The results show that DBD air plasma removes the organic contaminant on surface and causes electrode surface toughness, oxidization and nitridation. In addition, surface wettability is also improved, as concluded from contact angle measurements. (c) 2006 Elsevier B.V. All rights reserved.
Keywords:dielectric barrier discharge;electrode;plasma treatment;scanning electron microscope;X-ray energy dispersion spectroscopy