In this work, an ultra-high vacuum scanning tunneling microscopy has been utilized to study the effects of Si atoms to the formation and growth evolution of Er silicide nanostructures. Si evaporation is performed on the vicinal Si(001) surface as well as Er growth under different growth conditions: growth procedure, annealing temperature and duration time. The experimental results show that the Si evaporation performed at a high temperature plays a key role on the growth of Er silicide nanostructures. The deposited Si atoms become a significant source of the Si reactant and mainly affect the early growth stage of the nanostructures. It is also shown that Er atom is possibly another diffusing species during the growth of Er silicide nanostructures on the Si(001) surface. (c) 2006 Elsevier B.V. All rights reserved.