Growth as well as crystallographic and electronic properties of thin AlOx layers on Fe(110) were studied by means of low-energy electron diffraction and Auger-electron spectroscopy. Al layers of different thickness were deposited on Fe(110) and successfully oxidized to AlOx. The step-by-step oxidation of thin Al layers at room temperature leads to the formation of amorphous AlOx on top of the Fe(110) surface. A subsequent annealing at 250 degrees C of the oxidized 7-angstrom thick Al layer results in the formation of a well-ordered Al2O3(0001) layer on the Fe(110) surface. (c) 2006 Elsevier B.V. All rights reserved.