This study investigated how laser and wet etching methods of ITO substrates affect the optoelectrical properties of OLEDs. Experimental results indicated that the OLED with a laser-etched ITO substrate has a lower driving voltage than that with a wet-etched ITO substrate. According to scanning electron microscopy (SEM) and atomic force microscopy (AFM) measurements, the ITO etching methods yielded different surface morphologies of ITO pattern edges. The lower luminance of the OLED with a laser-etched ITO substrate is attributable to the fringe at the edge of ITO pattern, which causes a high local electric field resulting in the recrystallization of organic materials. (C) 2006 Elsevier B.V. All rights reserved.