X-ray photoelectron spectrometry (XPS), Fourier transform infrared spectrometry (FTIR), secondary-ion-mass spectrometry (SIMS) and contact angle measurement have been used in study of the enhancement effect of substrate pre-treatment by dielectric-barrier-discharge (DBD) for the self-assembly of a (3-Aminopropyl) trimethoxysilane (APTS) on glass substrates. In results, the concentration of the APTS molecules self-assembled on the surfaces of both the acetone-washed and the DBD-treated substrates were more than three times of that on the as-supplied substrate. Meanwhile, the self-assembly (SA) layers grown on the DBD-treated substrates have the best quality compared to those grown on the substrates pre-treated in other ways in terms of the silane-substrate bonding and the order of arrangement of the silane molecules. (C) 2007 Elsevier B.V. All rights reserved.