화학공학소재연구정보센터
Advanced Materials, Vol.6, No.1, 62-64, 1994
MONOCRYSTALLINE SI3N4 FILAMENTS
In the search for structural materials suitable for high temperatures, monocrystalline silicon nitride filaments have been synthesized by catalyzed chemical vapor deposition. Such a filament with a catalyst particle at the tip is shown in the Figure, The effect of various flow rates of N-2/NH3 and H-2, the X-ray emission spectra, and the mechanical properties of the filaments are presented.