Uniform arrays of intrazeolite germanium nanoclusters have been produced by the topotactic chemical vapor deposition of digermane within the diamond network of alpha-cages of acid zeolite Y and the main channel of mordenite. The conditions within the zeolite hosts ensure that the Ge2H2 CVD-type anchored precursors self-assemble to produce the anchored (Ge8)n+ nanoclusters shown in the Figure.