화학공학소재연구정보센터
Advanced Materials, Vol.6, No.10, 746-748, 1994
AEROSOL-ASSISTED CHEMICAL-VAPOR-DEPOSITION (AACVD) OF SILVER, PALLADIUM AND METAL ALLOY (AG1-XPDX, AG1-XCUX AND PD1-XCUX) FILMS
Thermally labile, low-volatility molecules are usually unsuitable as precursors for the chemical vapor deposition of high-quality metal films. Here, a new method, aerosol-assisted CVD (see Fig.), is reported, and used to produce crystalline silver, palladium, and binary metal alloy thin films from just such precursors.