화학공학소재연구정보센터
Advanced Materials, Vol.15, No.13, 1100-1100, 2003
Fabrication of highly conductive 12CaO center dot 7Al(2)O(3) thin films encaging hydride ions by proton implantation
Thin films of a new transparent oxide semiconductor 12CaO.7Al(2)O(3) consisting of subnanometer-sized cages (see Figure inset) have been fabricated, and their light-induced insulator-conductor conversion is described. Proton implantation at a fluence of 1 x 10(18) cm(-2) followed by UV-light irradiation increases the electrical conductivity by more than eleven orders of magnitude to the largest value similar to10 S cm(-1) (see Figure). The conducting state is erasable by heating.