화학공학소재연구정보센터
Advanced Materials, Vol.16, No.23-24, 2166-2166, 2004
Large-area three-dimensional structuring by electrochemical etching and lithography
The fabrication of three-dimensional silicon networks (see Figure) via a self-stabilized electrochemical etching technique onto lithographically pre-structured substrates is demonstrated. The optical characterization confirms a complete three-dimensional photonic bandgap of about 4% centered at 3 mum.