화학공학소재연구정보센터
Advanced Materials, Vol.17, No.12, 1480-1483, 2005
Bottom-up fabrication of carbon-rich silicon carbide nanowires by manipulation of nanometer-sized ethanol menisci
A nanometer-sized ethyl alcohol meniscus induced between a conductive atomic force microscope tip and a silicon surface (see Figure) allows the fabrication of nanodots or nanowires of SiCx at a predetermined position on the substrate. The meniscus size and kinetic parameters control the nanostructure size.