Advanced Materials, Vol.18, No.23, 3164-3164, 2006
Micropatterned porous-silicon Bragg mirrors by dry-removal soft lithography
Micropatterned porous-Si Bragg mirrors (see figure) are created by dry-removal soft lithography. This liftoff technique utilizes a patterned polymer stamp to remove porous-Si layers from the Si substrate. The nanostructure and optical properties of the porous-Si photonic crystal are conserved throughout the micropatterning process. In addition, reversible chemical sensing via optical reflectivity is demonstrated with a porous-Si Bragg mirror.