The synthesis of two new tert-butyl carbonic anhydride monomers, 4-vinylbenzoic and methacrylic tert-butylcarbonic anhydride was achieved successfully. Radical polymerization at 45 degrees C yielded tert-butyl pyrocarbonate protected materials. Thermographic analysis showed that both polymers decompose cleanly at 135 degrees C. The lithographic performance of both materials was evaluated in the presence of 2,4,6-tris-(trichloromethyl)-s-triazine as photoacid generating species. It was demonstrated that the large polarity change results in a positively working chemically amplified photoresist system.