Combinatorial pulsed laser deposition (PLD) technique has been applied to the fabrication of pentacene thin films for field effect devices. The pentacene films were fabricated by PLD with the Nd:YAG laser wavelength, fluence and the substrate temperature as combinatorial parameters. From the IR and UV-vis absorption spectra and electrical properties of the films, the laser wavelength and fluence have been elucidated to be factors dominating the properties of the film.