The objective of this study was to investigate the reaction behavior of the photocatalytic oxidation of gaseous trichloroethylene (TCE) using titanium dioxide at room temperature. The experiments were carried out under various humidity levels and oxygen contents of carrier gas in an annular photoreactor. Experimental results indicated that the factors affecting the photocatalysis of TCE by UV/TiO2 process are carrier gases and humidity. It was found that increasing the relative humidity in inlet gas flow under low humidity could improve the decomposition of trichloroethylene and the mineralization of organic intermediates at an irradiation UV light intensity of 2.82 W m(-2) by UV/TiO2 process. The photocatalytic kinetics of gaseous trichloroethylene can be described by the Langmuir-Hinshelwood rate equation.