유기실리콘화합물의 플라즈마 중합에 관한 연구: 2. 플라즈마 중합막의 물성

박수영; 김낙중; 김은영; 홍성일; Sasabe H

Polymer(Korea), Vol.16, No.2, 175-184, March, 1992

Export Citation

유기실리콘화합물의 플라즈마 중합에 관한 연구: 2. 플라즈마 중합막의 물성

Plasma Polymerization of Organosilicon Compounds : 2. Physical Properties of Plasma Polymer

박수영, 김낙중, 김은영, 홍성일, Sasabe H

초록

플라즈마 중합의 에너지 조건(W/Fm)에 따츤 유기실리콘 플라즈마 중합막의 밀도. 표면자유 에너지, 굴절률, 내부응력, 열적특성, 및 전기전도성의 변화를 상세히 검토하였다. 플라즈마 중합막의 이러한 물성은 모두 W/Fm 같의 조절에 의해 체계적이고 대폭적인 변화들 보였으며 이는 중합막의 화학구조적 변화특성과 일치하였다. 플라즈마 중합막의 이러한 물성변화는 플라즈마 중합의 활성화 성장기구에 의해 잘 설명되었다.

The density, surface free energy, refractive index, internal stress, thermal properties, and electrical properties of organosilicon plasma polymers were investigated in terms of the input energy level(W/Fm) of plasma polymerization. It was found that such material properties were uniquely controlled by W/Fm and also were in good correlations with their chemical structures. The controlled properties of plasma polymer were interpreted with the activation growth mechanism of plasma polymerization.

[References]

Yasuda H, "Plasma Polymerization," Academic Press, New York (1985)
Park SY, Kim N, Kim UY, Hong SI, Sasabe H, Polym.(Korea), 16(1), 94 (1992)
Owens DK, Wendt RC, J. Appl. Polym. Sci., 13, 1741 (1969)
Kaelble DK, Cirlin EH, J. Polym. Sci. A: Polym. Chem., 9, 363 (1971)
Yasuda H, Hirotsu T, Olf HG, J. Appl. Polym. Sci., 21, 3179 (1977)
Mort J, Jansen F, "Plasma Deposited Thin Films," CRC Press, Inc., Florida (1986)
Park SY, Kim N, Kim UY, Hong SI, Sasabe H, Polym.(Korea), in press, 16(3) (1992)
Wrobel AM, "Physicochemical Aspects of Polymer Surfaces, Vol. I," K.L. Mittal (eds.), Plenum Press, New York (1983)
Tyczkowski J, Czeremuszkin G, Kryszewski M, Phys. Stat. Sol., A72, 751 (1982)
Morita S, Mizutani T, Ieda M, Jpn. J. Appl. Phys., 10, 1275 (1971)
Tyczkowski J, Kryszewski M, Phys. Stat. Sol., A78, 259 (1983)
Szeto R, Hess DW, Thin Solid Films, 78, 125 (1981)

[Referenced By]

[1] Yasuda H, "Plasma Polymerization," Academic Press, New York (1985)

[2] Park SY, Kim N, Kim UY, Hong SI, Sasabe H, Polym.(Korea), 16(1), 94 (1992)

[3] Owens DK, Wendt RC, J. Appl. Polym. Sci., 13, 1741 (1969)

[4] Kaelble DK, Cirlin EH, J. Polym. Sci. A: Polym. Chem., 9, 363 (1971)

[5] Yasuda H, Hirotsu T, Olf HG, J. Appl. Polym. Sci., 21, 3179 (1977)

[6] Mort J, Jansen F, "Plasma Deposited Thin Films," CRC Press, Inc., Florida (1986)

[7] Park SY, Kim N, Kim UY, Hong SI, Sasabe H, Polym.(Korea), in press, 16(3) (1992)

[8] Wrobel AM, "Physicochemical Aspects of Polymer Surfaces, Vol. I," K.L. Mittal (eds.), Plenum Press, New York (1983)

[9] Tyczkowski J, Czeremuszkin G, Kryszewski M, Phys. Stat. Sol., A72, 751 (1982)

[10] Morita S, Mizutani T, Ieda M, Jpn. J. Appl. Phys., 10, 1275 (1971)

[11] Tyczkowski J, Kryszewski M, Phys. Stat. Sol., A78, 259 (1983)

[12] Szeto R, Hess DW, Thin Solid Films, 78, 125 (1981)