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Electrochemical and Solid State Letters, Vol.4, No.12, G119-G121, 2001
Magnetic properties of Fe- and Mn-implanted SiC
p-Type 6H-SiC substrates were implanted with Mn+ or Fe+ at doses of 3-5 x 10(16) cm(-2) under conditions that avoided amorphization (substrate temperature similar to 350 degreesC). After annealing at 700 degreesC, the magnetic properties of the samples were examined by superconducting quantum interference device magnetometry. Both the Fe- and Mn-implanted samples showed ferromagnetic properties up to approximately 250 K for the highest doses employed. The origin of the ferromagnetism is not the formation of secondary phases involving precipitation of Fe or Mn.