Pinpoint silver doping into borosilicate glasses by solid oxide electrochemical doping (SOED) was carried out using an electrolysis system consisting of Ag (anode)/Ag-beta " -Al2O3/glass/Na-beta " -Al2O3/Ag (cathode), where a Ag-beta " -Al2O3 microelectrode was used as a cationic source. Ag+ was doped into the glass together with the migration of Na+ from the glass to the cathode side Na-beta " -Al2O3 for maintenance of the electrical neutrality in the glass. Therefore, Ag+ was electrosubstituted for Na+ in the glass during the electrolysis. The distribution of silver occurred in a hemispherical shape with its center at the Ag-beta " -Al2O3/glass microcontact. The diameter of the Ag-doped area strongly depended on the applied electric charge, which reflects the amount of Ag doping. On the contrary, the distribution of silver was independent of the doping temperature. As a result, the pinpoint doping of silver into the borosilicate glass on a 10(2) mum scale was accomplished using SOED.