Nanocrystalline ZnO phosphor films were prepared from an ethanolic solution of zinc acetate dihydrate on fluorine-doped tin oxide coated glass substrates through a chemical bath deposition at a low temperature of 60 degreesC. Because the deposition was achieved without using a base such as NaOH or LiOH, the ZnO film prepared was chemically pure in terms of cation impurities. It was indicated that the deposition of ZnO proceeded through the formation and conversion of intermediate compounds such as layered hydroxide zinc acetate, Zn-5(OH)(8)(CH3COO)(2).O2H(2)O. Green photoluminescence from the film was observed by ultraviolet excitation. (C) 2004 The Electrochemical Society.