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Electrochemical and Solid State Letters, Vol.7, No.8, C84-C86, 2004
Contribution of primary chemical bonding states of amorphous carbon nitride to hardness
The hardness of amorphous carbon nitride (CN) was investigated by solid-state nuclear magnetic resonance (NMR) spectroscopy and Fourier transform infrared spectroscopy (FTIR). The results of NMR measurements showed that sp(2) and/or sp hybrid orbitals controlled the hardness of amorphous-CN films, which had been determined by nanoindentation tests. The intensity of the C-H and CN stretching modes observed in the FTIR spectra was the weakest in the hardest sample. The decreases of -CH3 and -CH2 groups indicated that the amorphous network had increased. The sp2 hybrid orbital forms a cross-linker which plays an important role in improving of the hardness of the film. (C) 2004 The Electrochemical Society.