High-quality barium strontium titanate (BST) thin films were fabricated using charged liquid cluster beam (CLCB) method. The X-ray diffraction patterns of the as-deposited BST films indicated that the perovskite phase appeared at 450 degrees C without any intermediate phase and high film crystallinity was achieved at 500 degrees C. The Ba:Sr:Ti ratio in the precursor solution was transferred to the deposited film without any loss. The crystallinity, dielectric constant, dissipation factor, and leakage current density were measured and compared for the as-deposited films prepared at 500 degrees C and the films deposited at 400 degrees C and postannealed at 700 degrees C. (C) 2004 The Electrochemical Society.