The preparation of the nano-crystalline quartz by atmospheric pressure chemical vapor deposition (AP-CVD) with the reaction of Si(OC2H5)(4), O-2, and HCl. Scanning electron microscopy and electron diffraction observations of the crystals deposited onto a Si(100) substrate showed that they showed quartz single crystal with nano-pillar morphology. (C) 2005 The Electrochemical Society.