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Electrochemical and Solid State Letters, Vol.10, No.9, J108-J112, 2007
Fabrication and characterization of a microsensor for detecting simultaneously both earth's magnetic field and acceleration
This paper presents a resonant microsensor for detecting simultaneously both the Earth's magnetic field and its acceleration. The structure design is based on the Lorentz force and lateral driving. The process uses a silicon-on-glass wafer and gold-silicon eutectic bonding for the wafer-level hermetic packaging. A prototype sensor with resonant frequencies in a range of around 2 kHz shows Q factors of about 7. In total, 2 mW is consumed in the current driving element. When 1 g and 0.35 G were applied to the sensor, a sensitivity of 104 mV/g and 5 mV/G was measured. (c) 2007 The Electrochemical Society.