Two-layer hybrid anti-reflection (AR) and anti-static (AS) films are formed on the flexible substrates such as polyethylene terephthalate and triacetyl cellulose. The AR layer is composed of two layers; indium-tin oxide (ITO) and thermo-curable fluorinated alkoxy silane compounds (JN7) made by DC magnetron roll sputtering and direct wet coating method, respectively. The polymer for an upper layer was used as the low refractive index (n(F) = 1.35) material, while ITO was chosen as the high refractive index (n(ITO) = 2.0) material with good electrical conductivity. The AR property (R < 0.8%) and the AS and electromagnetic shielding properties (i.e. the electrical conductivity) were almost the same as the conventional transparent multi-layer AR system. Published by Elsevier Science B.V.