Thin nanodotstructured metal films and heterostructured nanodot arrays (metal nanodot arrays/Si) with a high density and uniform distribution for various kinds of metals (Au, Al, Ag, Pb, Cu, Sn, and Zn) were fabricated by thermal vacuum evaporation using an anodic porous alumina membrane as a template. However, for such metals as Sri, Zn, and Pb with relatively lower melting point as compared with Al it was found that heterostructured nanodot arrays were not formed by a single stage of evaporation. For these metals, we developed a new method termed "two step evaporation method". The size and the arrays of dots were depended on the pore structure in the anodic porous alumina template. The technique demonstrated in this report is simple and suitable for the preparation of nanodot arrays in the large area for materials which could be vacuum evaporated. (c) 2006 Elsevier B.V. All rights reserved.