화학공학소재연구정보센터
Solid-State Electronics, Vol.44, No.2, 341-346, 2000
Demonstration of the first 4H-SiC avalanche photodiodes
4H-SiC visible-blind reach-through avalanche photodiodes (RAPDs) were designed and fabricated with mesa edge termination and thermal oxide passivation techniques. The devices show "hard" avalanche breakdown with a positive temperature coefficient. The photo response spectra, measured at different biases, displayed a maximum responsivity of 106 A/W, and a corresponding optical gain of about 500.