화학공학소재연구정보센터
Solid-State Electronics, Vol.44, No.8, 1441-1446, 2000
Obtaining interface state parameters by the MOS admittance technique accounting for fluctuation and tunnel effects
A new technique of determination of interface trap parameters from asymmetric curves of the normalized conductance of the metal-oxide-silicon (MOS) system is proposed within the framework of the tunnel-fluctuation model. In case of an exponential interface trap distribution in the oxide, the proposed technique allows one to obtain the interface state parameters from MOS admittance measurements without combining them with non-stationary methods.