화학공학소재연구정보센터
Solid-State Electronics, Vol.44, No.8, 1511-1514, 2000
Quantum mechanical influence and estimated errors on interface-state density evaluation by quasi-static C-V measurement
This paper quantitatively describes how the quantum-mechanical effect in inversion-layer capacitance influences interface state density evaluations performed by the quasi-static C-V method. A practical capacitance model is proposed for interface-state density evaluations. It is numerically shown that the classical quasi-static C-V technique underestimates the interface state density if the quantum-mechanical effect is significant.