화학공학소재연구정보센터
Solid-State Electronics, Vol.44, No.11, 1949-1954, 2000
A comparison of npn and pnp profile design tradeoffs for complementary SiGeHBT Technology
A comprehensive comparison of npn and pnp profile design tradeoffs for SiGe HBTs is conducted using calibrated simulations. The parasitic energy band barrier induced by the SiCe/Si transition in the collector-base space charge region produces very different design constraints for pnp and npn transistors, and they must be optimized separately. A single SiGe profile is found to give acceptable performance for both npn and pnp devices, while still satisfying film stability constraints.