화학공학소재연구정보센터
Solid-State Electronics, Vol.45, No.7, 1199-1203, 2001
Strained Si/SiGe quantum well MODFETs for cryogenic circuit applications
We present results from a strained Si/SiGe quantum well MODFET measured over the temperature range 4.2-0.3 K. The Si/SiGe quantum wells are characterized by magnetotransport measurements and Auger electron spectroscopy, The I-V characteristics of the device are well behaved with no sign of the 'kink-effect' often seen in cryogenic CMOS, The device performance is limited by the resistance of the source and drain contacts. By extracting the parasitic contact resistance, we are able to determine the intrinsic transconductance of the device, which is comparable to values measured in cryogenic CMOS.