A practical and efficient approach for estimating the MOSFET device and circuit performance distributions is presented. The proposed method is based on the Latin hypercube sampling technique and direct extracting and utilizing the statistical information obtained from a population of parametric test data. Using this approach, a set of worst-case models taking into account data correlations and equal probability constraints is developed. The procedure allows for a systematical and accurate way to predict the performance spread and worst case of MOSFET circuits, as well as a greatly reduced computation time for statistical simulation. Measured data of two digital circuits are included in support of the modeling work.