Layer-by-layer self-assembled thin films made of indium nanoparticles have been investigated as conductive materials to fabricate resistors. The functional resistors degrade as the current passes through the devices. However, it tends to be stable at some acceptable values. The rapid thermal annealing has a significant effect on the electrical characteristics of this thin film. The resistivity before annealing was 2.4 x 10(5) Omega cm, and it was reduced dramatically after annealing to about 0.9 Omega cm. (C) 2003 Elsevier Ltd. All rights reserved.