Solid-State Electronics, Vol.48, No.10-11, 2095-2098, 2004
Electrical parameters in highly doped strained n-Si1-xGex epilayers grown on Si substrates
Electrical resistivity and Hall coefficient measurements have been realized on strained highly doped single n-Si1-xGex epilayers grown on Si substrates in the temperature range 80-350 K. Free electron concentration and Hall mobility were determined. Conduction band parameters and high mobility results were discussed taking into account the strain induced conduction band modification. (C) 2004 Elsevier Ltd. All rights reserved.