In this paper, a numerical simulation of FinFET is carried out. This computational model is also applicable to nanowires. The non-equilibrium Green's function (NEGF) is used to handle the quantum transport along the channel, and 2-D Schrodinger equation is solved at the channel cross-section to obtain the electron density profile. With the 3-D Poisson's equation solved self-consistently, the model provides insights into the performance of FinFETs with ultra-small channel cross-dimension. (c) 2005 Elsevier Ltd. All rights reserved.