Reeves's CTLM was reviewed and its scope of application to extract specific contact resistance rho(c) was discussed theoretically. Using the same pattern provided by Reeves, the theoretical results with different rho(c) were calculated, which show that if the transfer length was small enough, the measurement of the contact end resistance R-E measurement was unreliable resulting in great error in the extraction of PC or even no solution. The scope of application of this extraction method was also discussed. It is found that the scope of application was not strongly dependent on the measurement accuracy. It is also found that Reeves's CTLM could be used only if the sheet resistance beneath the contact metal was quite small or the specific contact resistance was quite large. (c) 2006 Elsevier Ltd. All rights reserved.