In the present study plasma polymerization of tetraethylorthosilicate and hexamethyldisiloxane was carried out on polyethylene film with an aim of enhancing barrier properties. The glow discharge was obtained at 0.2 mbar using 13.56 MHz radio frequency source capable of giving power out put up to 100 W. The monomer vapors were passed in the system at the rate of 15 SCCM. The extent of deposition was determined from the weight gain study and the morphology was studied using SEM. Films were further characterized by surface energy measurement, ATR-FTIR and ESCA analysis. Since PE is widely used for packaging and in this process a thin layer of glass-like transparent SiOx was deposited, therefore it was thought necessary to study permeability to water vapors.