Thin films of two types of ferrites, NiZnFe2O4 spinel ferrite and CO2 Z-type hexaferrite (Ba3CO2Fe24O41) were prepared by rf sputtering on Si (1 0 0) and (1 1 1) substrates. Films with a thickness up to 100 nm were prepared for analysis purposes, enabling the optimization of the sputter process. The purpose of these ferrite thin films is the preparation of magnetic force microscopy (MFM) cantilever coatings for use with a high-frequency magnetic force microscope (HF-MFM). As a basis for these probes, the authors employ commercial, micromachined silicon cantilevers. The typical thickness of the coatings was 50 nm. The MFM imaging properties of both types of ferrite-coated cantilevers are discussed in detail. (C) 2007 American Vacuum Society.