화학공학소재연구정보센터
Journal of Crystal Growth, Vol.308, No.2, 412-416, 2007
Growth and characterization of nonpolar ZnO (1 0 (1)over-bar 0) epitaxial film on gamma-LiAlO2 substrate by chemical vapor deposition
A simple chemical vapor deposition approach to the growth of nonpolar ZnO with [1 0 (1) over bar 0] orientation on a gamma-LiAlO2 substrate is presented. The dependence of growth characteristics on the growth temperature is investigated. Following the CVD growth, the surface morphologies of ZnO film were investigated by a scanning electron microscope. The characterizations of structure and orientation by a scanning transmission electron microscope indicate that the ZnO film is oriented in the nonpolar [1 0 (1) over bar 0] m-direction. Photoluminescence result of nonpolar ZnO shows a strong UV emission peak at around 375 nm at room temperature. (C) 2007 Elsevier B.V. All rights reserved.