Spray pyrolysis of di-n-butyltin(W) diacetate (DBTDA) has led to the deposition of [200]-oriented SnO2 film on a glass substrate. In order to clarify growth mechanism of the preferential orientation the sprayed SnO2 thin film has been investigated by using the atomic force microscopy and the X-ray photoelectron spectroscopy. The results have suggested that the sprayed solution forms the SnO2 small particles on the glass substrate and they spread overall relatively soon. At the very early stage each particle grows with almost the same rate and only its density increases with no change in a surface roughness. (c) 2007 Elsevier B.V. All rights reserved.