Based on the Extended-Maugis-Dugdale (EMD) elastic theory, a single asperity capillary meniscus model considering asperity deformation due to both contact and adhesive forces was developed. Specifically included in the single asperity meniscus model was the solid surface interaction inside the contact area. Subsequently, the single asperity model was coupled with a statistical roughness surface model to develop an improved meniscus surface model applicable to a wide-range of humidity levels and adhesion parameter values. Simulations were performed using typical surfaces found in microelectromechanical systems (MEMS) and magnetic storage hard disk drives to examine the effects of surface roughness and relative humidity. It was found that smoother surfaces give rise to higher adhesive and pull-off forces, and at higher relative humidity levels, the capillary force governs the adhesive behavior. As the humidity decreases, the solid surface interaction increases and needs to be included in the total meniscus adhesion. By integrating the adhesive force-displacement curves, the adhesion energy per unit area was calculated for MEMS surfaces and favorably compared with reported experimental data. (C) 2007 Elsevier Inc. All rights reserved.