Thin films of silver selenide with varying composition have been deposited on magnesium oxide substrates with pulsed laser deposition and were investigated via micro-XRF. A calibration procedure was designed to determine the absolute thicknesses of the films. The lateral homogeneity was investigated by elemental mapping, thus delivering information about the deposition process. Wet chemical analysis was performed on the dissolved layers with ICP-OES and ICP-MS to determine the stoichiometry of the Ag (x) Se (y) . The results suggest a correlation between the composition of the layers and their thicknesses by showing a silver enrichment for thinner layers.