We show that N-2 plasma treatment introduces both nitrogen and oxygen functional groups onto the Parylene surface without significantly changing the Parylene surface morphology. X-ray photoelectron spectroscopy ( XPS) analyses reveal that there is more copper(II) bis(1,1,1,5,5,5- hexafluoro- 2,4- pentanedionate) [Cu(hfac)(2)] adsorbed on the plasma- treated Parylene surface than on the untreated Parylene surface, which indicates that the chemisorption of Cu(hfac)(2) on the Parylene surface is enhanced by its interaction with the existing functional groups. The Cu(hfac)(2) interacts with functional groups via the transfer of H atoms to hfac ligands, resulting in the formation of volatile Hhfac. The F 1s XPS spectrum observed on the Parylene surface after being exposed to the Cu(hfac)(2) precursor suggests that the hfac ligands are still attached to Cu. The binding energy of Cu 2p(3/ 2) observed in the XPS spectra is in the range 934.4 - 935.3 eV, which is higher than that of bulk metallic Cu (932.4 eV) and closer to the Cu-(II) oxidation state. (c) 2007 The Electrochemical Society.