The authors report serial bideposition of structurally chiral films for deep ultraviolet (DUV) wavelengths. Scanning electron micrographs confirm that the Sc2O3 films have a twisted columnar nanostructure similar to a double-start screw. Observation of circular Bragg resonances in reflection and transmission at 230 nm indicates a dielectric pitch of 65 nm, an average refractive index of 1.75, and local in-plane linear birefringence of 0.05. Possible applications of DUV chiral media include novel thin film polarizing devices for use in the DUV spectral region, where conventional designs are currently severely constrained by material properties. (c) 2007 American Vacuum Society.