Significant reduction in the outgassing rate of 300-series stainless steel is routinely attained through combination of electropolishing and vacuum baking. Preferential removal of Ni, Fe, and Mn from the surface of stainless steel by electropolishing creates a chromium-enriched surface. It also reduces the atomic surface area of the work piece closer to its geometric surface area. When the material is vacuum fired to remove interstitial hydrogen, the resultant stainless steel exhibits an outgassing rate of about 2 X 10(-15) torr 1/cm(2) s, as well as drastically reduced adsorption, absorption, and catalytic behaviors. (c) 2007 American Vacuum Society.