Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.25, No.3, L19-L21, 2007 DOI10.1116/1.2735968 Export Citation Deposition of zinc oxide layers by high-power impulse magnetron sputtering Konstantinidis S, Hemberg A, Dauchot JP, Hecq M Please enable JavaScript to view the comments powered by Disqus.
