The authors report a process for constructing a scanning near-field microwave microscope (SNMM) probe based on microelectromechanical systems technology. The SNMM probe is capable of performing as a multifunctional scanning probe microscope. Mechanically, it consists of a diving-board-like cantilever with an integrated, ultratall (>50 mu m) silicon tip and is interchangeable with typical commercial atomic force microscope probes. Electrically, it employs a coplanar waveguide running from the contact pads on a high-resistivity silicon chip body onto the cantilever and out to the ultratall coaxial tip at the free end of the cantilever. The ultratall coaxial tip functions as an electrically small antenna for scanning microwave microscopy applications, as well as simultaneously permitting atomic force microscopy to be carried out. The fabrication procedure and results are described, along with preliminary microwave measurements. (c) 2007 American Vacuum Society.