Nanostructured thin films of poly(p-xylylene) derivatives are deposited by oblique angle vapor deposition method under low-vacuum conditions. We showed deposition of columnar nanostructured poly(chloro-p-xylylene) and poly(bromo-p-xylylene) thin films, and co-deposition of nanostructured poly(o-trifluoroacetyl-p-xylylene-co-p-xylylene) thin film. Characterization of both the nanostructured and planar thin films of poly(p-xylylene) are performed with different experimental methods. We developed a generalized strategy towards depositing nanostructured poly(p-xylylene) derivatives and thus promise a new generation of thin films suitable for biomedical and antifouling applications. (c) 2007 Elsevier Ltd. All rights reserved.