In this work the indium-tin-oxide (ITO) thin films have been prepared by pulsed laser deposition on glass substrate. The structural, electrical and optical properties of the films have been studied as a function of substrate temperature and background deposition pressure. The dielectric function of ITO films was obtained in the wave-length range 220-2400 nm by fitting the measured transmission and reflection spectra to a dispersion relation, which combines the Drude model and Lorentz oscillator. The correlation between deposition conditions and physical properties of ITO films was observed and analysed. (C) 2007 Elsevier B.V. All rights reserved.