The growth of SiOx nanofibers on iron silicide substrates with Ga droplets was examined. It is found that well-aligned, highly oriented nanofibers were grown in an orderly fashion with a high density from FeSi substrates. Though the length of the nanofibers depends on the growth time and the growth temperature, their diameters were about 20 run throughout the nanofibers grown under the examined growth conditions. On the other hand, although the evidence of the growth of highly oriented, dense and well-aligned nanofibers was not obtained, the growth of small piece of nanofibers was evident, for the use of beta-FeSi2 substrates. (c) 2007 Elsevier B.V. All rights reserved.