This paper reports the fabrication process of beta-FeSi2 droplets on silicon substrates at room temperature by ArF excimer pulsed laser deposition (PLD). The chemical treatment of substrate could compensate the thermal treatment of the deposited droplets. Observations with the transmission electron microscopy revealed that the crystallization of droplet began from the surface of droplet rather than from the interface between the melt and the substrate. (c) 2007 Elsevier B.V. All rights reserved.